基于CO_(2)激光焊接的高温光纤压力传感器的研制

Development of High Temperature Optical Fiber Pressure Sensor Based on CO_(2) Laser Welding

为了满足高温环境下的压力测量需求,研制了一种基于CO_(2)激光焊接的高温F-P光纤压力传感器。介绍了MEMS压力敏感结构的制作过程,分析了传感器各组件之间的焊接工艺,实现了高温F-P光纤压力传感器的无胶化封装。在此基础上,对传感器的温度特性和高温压力性能进行了研究。结果表明,采用CO_(2)激光焊接封装的传感器可靠性高,在高温下信号传输正常,未出现光谱能量衰减现象。温度达300℃时,传感器在0~2.5MPa范围内的测量误差小于0.2%FS,能够实现高温压力的准确测量。但温度对传感器的影响不可忽略,在实际应用过程中需对传感器进行温度补偿。

In order to meet the pressure measurement requirements in high temperature environments,a high temperature F-P(Fabry-Perot)optical fiber pressure sensor based on CO_(2) laser welding was developed.The manufacturing process of the MEMS(Micro Electro Mechanical Systems)pressure sensitive structure was introduced,the welding process between the sensor components was studied,and the no-adhesive packaging of the high temperature F-P optical fiber pressure sensor was achieved.On this basis,the temperature characteristics and high temperature pressure performance of the sensor were studied.The research results showed that the sensor packaged by CO_(2) laser welding has high reliability,and the sensor signal was transmitted normally at high temperature with no spectral energy attenuation phenomenon.In the environment of300℃,the measurement error of the sensor in the pressure range of 0~2.5 MPa was less than 0.2%FS,which realized the accurate measurement of high temperature pressure.However,the influence of temperature on the sensor cannot be ignored,and the sensor needs to be temperature compensated in the application.