摘要
在传统的生物过孔实验中通常使用MEMS(微机电系统)设计制造的单层纳米孔芯片。而随着对生物结构探索的进一步加深,需要多层纳米孔结构才能满足实验需求。该文针对纳米孔测序设计了多层纳米孔芯片制造的MEMS实验过程,包括芯片版图设计、薄膜沉积、窗口及基体释放、纳米孔制造等多种工艺,最终得到实验所需的多层纳米孔芯片。
Single nanopore chips designed and manufactured by MEMS(Micro-Electro-Mechanical Systems)are used for traditional biological nanopore experiments.With development of exploring for biological structures,multilayer nanopore structure is required for experiment.Multilayer nanopore structure is designed for nanopore sequencing by MEMS,include chip layout design,film deposition,window and substrate release,nanopore manufacturing,finally we get the nanopore chip for sequencing experiment.
作者
叶佳佳
YE Jiajia(School of Physical Science and Technology,Soochow University,Suzhou,Jiangsu Province,215000 China)
出处
《科技资讯》
2021年第11期5-11,共7页
Science & Technology Information
基金
2019—2022苏州大学校企横向技术服务课题(项目编号:H190378)。
关键词
多层芯片
MEMS
纳米孔
生物测序实验
Multilayer chip
MEMS
Nanopore
Biological sequencing experiment
