钌粉在不同温度下双向真空热压后的显微结构和晶体学演变(英文)

Microstructure and crystallographic evolution of ruthenium powder during biaxial vacuum hot pressing at different temperatures

在温度为1050℃至1450℃、时间为2 h的条件下对钌粉进行了双向真空热压烧结。采用扫描电子显微镜(SEM)和X射线衍射(XRD)对烧结样品进行了分析。在1250℃烧结时,真空热压样品的相对密度达到理论密度的99.7%;当温度进一步升高,密度出现下降。在不同的烧结温度可以看到不同的晶粒和孔洞形貌。XRD数据表明在烧结过程中获得了(002)择优取向。随着烧结温度的增加残余应力有所减小。

Ruthenium powders were compacted by biaxial vacuum hot pressing(VHP) at a sintering temperature of 1050℃ to 1450℃ for 2 hours. The compacted samples were characterized by scanning electron microcopy(SEM) and X-ray diffraction(XRD). The relative density of the VHP compacted samples reached 99.7% of the theoretical value when sintered at 1250℃,and its density decreased with the increase of sintering temperature. Different grain and pores morphologies were observed in different areas of the samples depending on the sintering temperature. XRD data revealed that a preferred orientation along the(002) direction was achieved during the sintering process. The results also showed a stress relaxation reduced with the increase of sintering temperature.