基于法布里−珀罗标准具的微小角度测量及不确定度评定方法

Micro-angle Measurement Method and Its Accuracy Evaluation Based on Fabry-Perot Etalon

研究了一种基于法布里−珀罗标准具多光束干涉成像的微小角度测量方法。通过计算同心干涉圆环圆心位置变化量(圆心位移量)和成像物镜焦距,实现反射镜微小偏转角度的测量。采用相对测量原理,构建了基于圆心位移量不确定度分量和成像物镜焦距不确定度分量的微小角度测量不确定度评定模型。选取2 mm间隔的F-P标准具进行微小角度的测量实验研究,并进行了数据处理。实验结果表明,在600″微小角度测量范围内,测量不确定度不大于0.132″;在40″微小角度测量范围内,测量不确定度不大于0.045″。该方法可为具有自校准特性的、更高准确度的微小角度测量的实现提供参考。

A micro-angle measurement method based on Fabry-Perot etalon is proposed.Particularly,by calculating the displacement of center of the imaging concentric rings and the focal length of the imaging objective lens,the micro angle of the deflected mirror is obtained.The evaluation model of the micro angle uncertainty,based on the uncertainty components of the center displacement and the focal length of the imaging objective lens,is constructed.The Fabry-Perot etalon with an interval of 2 mm is selected to carry out the experimental research on the measurement of micro angles,and the data is processed.The experimental results indicate that the maximum measurement uncertainty is 0.132"and 0.045"in the range of 600"and 40",respectively.The proposed method can provide a reference for the realization of the selfcalibrated,higher-accuracy micro-angle measurement.