基于直流辉光放电等离子体的气体压力传感器

Pressure Sensor Based on Direct Current Discharge Plasma

研究了一种基于直流辉光放电等离子体原理的气体压力测量方法,设计了一种等离子体压力传感器,并对该传感器的放电维持电压与气压之间的关系进行了稳态及动态标定实验。稳态标定实验结果表明,50μm间隙适用于气压量程0.4~2.0atm(1atm=101325Pa),220μm适用于气压量程0.5~5.0atm,此时电流选取在3.0~5.0mA之间。动态标定实验在激波管实验台上进行,结果表明等离子体压力传感器和参考Endevco压阻式传感器的上升时间基本一致,均为1μs;且通过计算动态传递函数可得,该等离子体压力传感器及其电源、电子电路系统的固有频率为146.6kHz,未来可以为航空发动机、冲压发动机严苛高温环境及超高速流动中的高频压力脉动信息的获取提供支撑。

A type of pressure measuring method based on direct current glow discharge plasma was investigated and a plasma pressure sensor was designed in this paper.The static and dynamic calibrations between the discharge maintaining voltage and air pressure were experimentally tested and analyzed.The static calibration results showed that a spacing of 50μm is suitable for the pressure range from 0.4 to 2.0 atm.A spacing of 220μm is appropriate for the pressure range from 0.5 to 5.0 atm when the currents are selected between 3.0~5.0mA.Additionally,the dynamic calibration experiment was carried out on the shock tube.The results showed that the rise time of the plasma pressure sensor is 1μs,which is the same as the Endevco piezo-resistance transducer.By calculating the dynamic transfer function,the natural frequency of the plasma pressure sensor including its power supply and electronic circuit system is 146.6kHz,which has great potential for acquiring high-frequency flow information in the harsh high temperature and ultra-high-speed flow environment of the aircraft and ramjet engines.