摘要
A novel athermal scheme utilizing resonance splitting of a dual-ring structure is proposed.Detailed design and simulation are presented,and a proof of concept structure is optimized to demonstrate an athermal resonator with resonance wavelength variation lower than 5 pm∕K within 30 K temperature range.
基金
This work was partially supported by the Major International Cooperation and Exchange Program of the National Natural Science Foundation of China under Grant 61120106012
partially by the National Natural Science Foundation of China under Grant 61205026.
