一种内贴片式压电泵的结构设计与理论分析

Structural Design and Theoretical Analysis of an Internal Patch-type Piezoelectric Pump

针对无阀压电泵的输出压力小的问题,提出了一种内贴片式无阀压电泵。压电泵采用螺纹配合结构,由压电振子和螺杆组成,其中压电振子包括金属基体和压电陶瓷片。压电振子通过交流电信号形成旋转弯曲运动,与外部衬套配合形成可移动空腔运输液体。首先进行了模态理论分析,构建了水环境下的流固耦合运动方程。接着利用有限元软件对压电振子进行了模态分析。结合频率一致性和相邻干扰模态设计要求,对压电振子的结构参数进行优选。对压电振子的湿模态进行了仿真分析。结果表明:与空气条件下相比,水环境下的振动频率较低,下降了343.7 Hz和326.4 Hz,并且频率一致性更差,这为后续压电泵研究分析打下了基础。

To alleviate the problem of low back pressure of valve-less piezoelectric pump,an internal patch valve-less piezoelectric pump was proposed.The piezoelectric pump was used in the threaded structure,which was composed of a piezoelectric vibrator and a screw.The piezoelectric vibrator included a metal substrate and a piezoelectric ceramic plate.The piezoelectric vibrator formed a rotating bending motion through alternating current(AC)signal,and then formed a movable cavity to transport liquid in combination with the external sleeve.Firstly,the modal theory analysis was carried out,and the fluid-structure coupling motion equation under water environment was constructed.Then the piezoelectric vibrator s modes were analyzed by finite element software.Combined with the requirement of frequency consistency and adjacent interference modes,the structural parameters of the piezoelectric vibrator were optimized..The wet modes of the piezoelectric vibrator were simulated and analyzed.The results show that compared with the air condition,the vibration frequencies in water environment are lower,decreasing by 343.7 Hz and 326.4 Hz,and the frequency consistency is worse,which lays a foundation for the subsequent research and analysis of piezoelectric pump.