三维数值模拟射频热等离子体的物理场分布

Three-dimensional numerical simulation of physical field distribution of radio frequency thermal plasma

射频热等离子体的产生包含了丰富、复杂的物理场分布,正确认识这些物理场分布对射频热等离子体在工业领域的应用有指导作用.本文建立了三维射频热等离子体的热-电-磁-流动强耦合数学物理模型,考虑了感应线圈的真实螺线管结构,开发了用于计算三维射频热等离子体复杂电磁场的C++程序代码,计算了射频热等离子体重要物理场,如温度场、流场和电磁场的分布情况.结果表明,射频热等离子体各物理场分布具有三维非对称效应,感应线圈结构对温度场和流场的空间分布有重要影响.研究结果对优化、控制射频热等离子体的实际应用过程有重要的指导意义.

Radio frequency(RF)thermal plasma involves abundant and complex physics.The understanding of the physical field distributions of the RF thermal plasma is helpful to its applications in industrial field.In this paper,an electro-thermal-magnetic-flow strong coupling mathematical and physical model of three-dimensional RF thermal plasma is established,the actual solenoid structure of the induction coil is considered,and a C++code is developed for calculating the complex electromagnetic field in a customized version of the computational fluid dynamics commercial code FLUENT.The physical fields of RF thermal plasma,such as temperature field,flow field and electromagnetic field are studied.The electrical conductivity,thermal conductivity and viscosity distribution of the plasma are investigated.The results show that the physical field distribution of RF thermal plasma has an important non-axisymmetric three-dimensional effect due to the actual shape of the non-axisymmetric induction coil structure.The plasma discharge presents an annular distribution with a certain deflection angle.The distribution of plasma flow field shows a non-axisymmetric electromagnetic pump effect which is different from that of the two-dimensional model.The results have great guiding significance for optimizing and controlling the RF thermal plasma in various application areas.