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A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing 被引量:6

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摘要 The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human–machine interfaces.Self-powered triboelectric tactile sensors with high sensitivity,reduced crosstalk,and simple processing routes are highly desirable.Herein,we introduce a facile and low-cost fabrication approach for a metal-electrode free,fully integrated,flexible,and self-powered triboelectric tactile sensor array with 8-by-8 sensor units.Through the height difference between the sensor units and interconnect electrodes,the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers.The tactile sensor array shows a remarkable sensitivity of 0.063VkPa^(–1) with a linear range from 5 to 50kPa,which covers a broad range of testing objects.Furthermore,due to the advanced mechanical design,the flexible sensor array exhibits great capability of pressure sensing even under a curved state.The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array.Finally,real-time tactile sensing associated with light-emitting diode(LED)array lighting demonstrates the potential application of the sensor array in position tracking,self-powered touch screens,human–machine interfaces and many others.
出处 《Microsystems & Nanoengineering》 EI CSCD 2020年第1期615-623,共9页 微系统与纳米工程(英文)
基金 This work was funded by HKSAR The Research Grants Council Early Career Scheme(Grant no.24206919) HKSAR Innovation and Technology Support Program Tier 3(Grant no.ITS/085/18) the Chinese University of Hong Kong Direct Grant(Grant no.4055086) Shun Hing Institute of Advanced Engineering(Grant no.RNE-p5-18) City University of Hong Kong(Grant no.9610423,9667199).
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