摘要
该文提出一种基于遗传算法选标记的智能算法,该算法利用遗传算法解决了光刻过程中硅片对准选标记的问题,该算法的特点是可以不依赖对人的经验需求,快速选择标记,并且选择的对准标记可以满足套刻性能要求。
A new choosing marks method is proposed that uses Genetic Algorithm.This new method can be interpreted as selecting the marks which mainly attributable to the Overlay.Experimental results indicate that our proposed method is not only effective for overlay control,but also can used for the process operator without experiences.
作者
马琳琳
MA Lin-lin(Shanghai Microelectronics Equipment Group Co.,Ltd,Shanghai201203,China)
出处
《电脑知识与技术》
2021年第21期111-113,共3页
Computer Knowledge and Technology
关键词
遗传算法
标记
Genetic Algorithm
mark
