摘要
The electron energy distribution functions(EEDFs)are studied in the planar-type surface-wave plasma(SWP)caused by resonant excitation of surface plasmon polaritons(SPPs)using a single cylindrical probe.Sustained plasma characteristics can be considered as a bi-Maxwellian EEDF,which correspond to a superposition of the bulk low-temperature electron and the high-energy electron beam-like part.The beam component energy is pronounced at about 10 eV but the bulk part is lower than 3.5 eV.The hot electrons included in the proposed plasmas play a significant role in plasma heating and further affect the discharge chemistry.
作者
HU Ye-Lin
CHEN Zhao-Quan
LIU Ming-Hai
HONG Ling-Li
LI Ping
ZHENG Xiao-Liang
XIA Guang-Qing
HU Xi-Wei
胡业林;陈兆权;刘明海;洪伶俐;李平;郑晓亮;夏广庆;胡希伟(College of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan 232001;State Key Laboratory of Advanced Electromagnetic Engineering and Technology,Huazhong University of Science and Technology,Wuhan 430074;State Key Laboratory of Structure Analysis for Industrical Equipment,Dalian University of Technology,Dalian 116024)
基金
by the National Natural Science Foundation under Grant No 11105002
the Doctoral Scientific Research Fund of Anhui University of Science and Technology(No 2010yb011)
the Generations’Innovation Fund of Huazhong University of Science and Technology(No HF0601708131)
the ITER Domestic Matching Item of China(No GB105003).
