摘要
Nanowire stiction is a crucial bottleneck for the development of M/NEMS devices.We present a model of a nano-beam stuck to the substrate in consideration of both surface elasticity and residual surface stress.The critical detachment length can be derived from the transversality condition using the variational method.The effects of the surface parameters on the adhesion of the nano-beam are discussed in detail.These analyses provide some suggestions for engineers in the design and fabrication of more accurate M/NEMS instruments.
作者
刘建林
夏热
周跃亭
LIU Jian-Lin;XIA Re;ZHOU Yue-Ting(Department of Engineering Mechanics,China University of Petroleum,Qingdao 266555;Key Laboratory of Transients in Hydraulic Machinery,Ministry of Education,Wuhan 430072;School of Mechanical Engineering,Yonsei University,Seoul 120-749,Republic of Korea)
基金
by the National Natural Science Foundation of China under Grant Nos 10802099 and 11102140
the Doctoral Fund of Ministry of Education of China(No 200804251520)
the Natural Science Foundation of Shandong Province(No ZR2009AQ006)
the Brain Korea Scholarship from Seoul National University。
