微纳光纤直径测试技术研究

Research on diameter measurement technology of optical microfiber

为了测量微纳光纤直径,采用了液体浸没强度检测法。首先对微纳光纤-液体圆柱形波导结构进行理论分析,得到了整根微纳光纤附加损耗与外形参量的对应关系,搭建了微纳光纤直径测试实验系统,并对两组直径不同的微纳光纤进行了测试。结果表明,直径为2.7μm时,直径测试最小分辨率约为3nm,4根微纳光纤的直径偏移量分别是40nm,30nm,80nm和20nm;直径为4μm时,直径测试最小分辨率约为12nm,4根微纳光纤的直径偏移量分别是60nm,90nm,10nm和30nm,有较好的直径一致性,证明了液体浸没强度检测法的可行性。此研究对微纳光纤进一步走向实用提供了技术支持。

In order to measure the diameter of the optical microfibers(OMs),the liquid immersion intensity detection method was used.Firstly,the structure of OM-liquid cylindrical waveguide was analyzed theoretically,and the relationship between the additional loss and the shape parameters of the whole OM was obtained.Then,an experimental system was set up to test two groups of OMs with different diameters.The experimental results show that when the diameter was 2.7μm,the minimum resolution of diameter measurement is about 3nm and the diameter offsets of four OMs are 40nm,30nm,80nm and 20nm,respectively.When the diameter is 4μm,the minimum resolution of diameter measurement is about 12nm and the diameter offsets of four OMs are 60nm,90nm,10nm and 30nm,respectively.At the same time,the results showe well diameter consistency and verified the feasibility of liquid immersion intensity detection method.This research provided technical support for the further development of OMs.