离子注入机金属铝离子源的气源的优选

Optimization of Gas Source for Metal Aluminum Ion Source of Ion Implanter

注铝离子注入机,是宽禁带半导体SiC产业的关键设备,金属铝离子源直接影响了整机的性能指标,特别是PM周期和离子源寿命。为保证离子源的长寿命和铝离子大束流,针对金属铝离子源放电的辅助气源进行了一系列的研究和实验,包括铝离子产额、束流质谱、阴极使用寿命及污染导致的放电打火情况等,通过实验结果筛选出最佳的气源。

Aluminum ion implanter is the key equipment of wide band gap semiconductor SiC industry.Aluminum ion source directly affects the performance of the whole machine,especially PM cycle and ion source life.In order to ensure the long life of ion source and large beam current of aluminum ion,a series of research and experiments are carried out on the auxiliary gas source of metal aluminum ion source discharge,including aluminum ion yield,beam mass spectrometry,cathode service life and discharge ignition caused by pollution,etc.Finally,the best gas source is selected through the experimental results.