摘要
We demonstrate a type of 2 × 2 multimode interference 3 dB coupler based on silicon-on-insulator.The fabrication tolerance was investigated by the effective index method and the guide mode method.The devices with different lengths were fabricated and near-field output images were obtained.Tolerances to width,length and etch depth are 2,200 and 2μm,respectively.The devices show a uniform power distribution.
作者
WEI Hong-Zhen
YU Jin-Zhong
LIU Zhong-Li
ZHANG Xiao-Feng
SHI Wei
FANG Chang-Shui
魏红振;余金中;刘忠立;张小峰;史伟;房昌水(State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083;Microelectronics Center,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083;State Key Laboratory of Crystal Materials,Shandong University,Ji’nan 250100)
基金
Supported by the National Natural Science Foundation of China under Grant Nos.69896260 and 69990540。
