摘要
Self-assembly of silicon nanowire(SiNW)arrays is studied using SF_(6)/0_(2)plasma treatment.The self-assembly method can be applied to single-and poly-crystalline Si substrates.Plasma conditions can control the length and diameter of the SiNW arrays.Lower reflectance of the wire arrays over the wavelength range 200-1100nm is obtained.The conducting transparent indium-tin-oxide(ITO)electrode can be fully coated on the self-assembled SiNW arrays by sputtering.The ITO-coated SiNW solar cells show the same low surface light reflectance and a higher carrier collection efficiency than SiNW solar cells without ITO coating.An efficiency enhancement of around 3 times for ITO coated SiNW solar cells is demonstrated via experiments.
