Tunable Vertical-Cavity Surface-Emitting Lasers Integrated with Two Wafers

A novel two-wafer concept for micro-electro-mechanically tunable vertical cavity surface emitting lasers(VCSELs)is presented.The VCSEL is composed by two wafers:one micro-electromechanical-system membrane wafer with four arms to adjust the cavity length through electrostatic actuation and a"half-VCSEL"wafer consisting of a fixed bottom mirror and an amplifying active region.The measurement results of the electricity pumped tunable VCSEL with more than 9mW output power at room temperature over the tuning range prove the feasibility of the proposition.