摘要
The performance and characteristics of a cathodic arc plasma source,consisting of a titanium cathode,an anode with and without a tungsten mesh,and a coil producing a focusing magnetic field between the anode and cathode,are investigated.The high transparency and large area of the mesh allow a high plasma flux to penetrate the anode from the cathodic arc.The mesh helps to decrease the arc resistance and the ignition voltage of the cathodic arc in the focusing magnetic field,and increase the life of the source.which means that the source makes the cathodic arc easily and greatly stabilized during the operation when a focusing magnetic field exists in the source.
作者
ZHANG Tao
ZHANG Hui-Xing
Ian G.Brown
Paul K.Chu
张涛;张荟星;Ian G.Brown;Paul K.Chu(Beijing Radiation Center,Institute of Low Energy Nuclear Physics,Beijing Normal University,Beijing 100875;Department of Physics and Materials Science,City University of Hong Kong,83 Tat Chee Avenue,Kowloon,Hong Kong;Lawrence Berkeley National Laboratory,University of California,Berkeley,CA 94720,U.S.A.)
基金
Supported by the Beijing Natural Science Foundation(1002005)
the Beijing Science and Technology New Star Plan(952870400).
