摘要
An Y-Ba-Cu-O superconducting film with onset temperature Tc(onset)=91K and zero resistance temperature Tc(end)=81.4K has been obtained for the first time by wing electron cyclotron resonance(ECR)plasma ions deposition technique.The relationship between the composition of the film and the atmosphere as well as the distance between the target and substrate has also been given.
基金
This work was reported at the National HTS thin films conference,Hefei,April 1989.
