摘要
We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm.To obtain a planar waveguide, oxygen ions with an energy of 3.0 Me V and a fluence of 1.5 × 10^(15) ions=cm^(2) are implanted in the polished face of Li Nb O_(3) crystals. For planar waveguides, a loss of 0.5 d B/cm is obtained after annealing at 300°C for30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.
作者
赵金花
焦学帅
任莹莹
谷金军
王素梅
卜铭洋
王磊
Jinhua Zhao;Xueshuai Jiao;Yingying Ren;Jinjun Gu;Sumei Wang;Mingyang Bu;Lei Wang(School of Science,Shandong Jianzhu University,Jinan 250101,China;Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan 250014,China;School of Physics,Shandong University,Jinan 250100,China)
基金
supported by the National Natural Science Foundation of China(Nos.11874243 and 11805142)
the Natural Science Foundation of Shandong Province(No.ZR2017MA052)。
