基于游标原理的法布里-珀罗温度传感器的增敏方法

Sensitization Method of Fabry-Perot Temperature Sensor Based on Vernier Principle

根据并联型游标效应的工作原理,提出一种通过叠加光谱实现游标效应的增敏方法。通过法布里-珀罗(F-P)温度传感干涉仪获得实测的反射光谱,然后在数据处理时叠加上根据F-P干涉原理获得的参考干涉仪的反射光谱,实现了游标效应。在30~55℃的温度范围内,实现了5.0380 nm/℃的温度灵敏度。通过改变参考干涉仪的腔长,可以实现可控的温度灵敏度,通过调整参考干涉仪入射光的初始相位,可以使游标包络中用于测量的谷值点落在任何需要的波长位置。同时,分别设计和制备了腔长为118.60μm的F-P传感干涉仪和腔长为96.60μm的F-P参考干涉仪,进行了基于并联型游标效应的温度增敏实验,获得了2.7984 nm/℃的温度灵敏度,其与叠加具有相同腔长的F-P反射光谱实现的温度灵敏度一致,相对误差仅为0.57%。可见通过叠加光谱实现游标效应是可行且有效的,同时也很好地解决了参考干涉仪易受外界环境影响的问题。

Based on the working principle of the parallel Vernier effect, a sensitization method to achieve the Vernier effect by superimposing the spectrum is proposed. The Fabry-Perot(F-P) temperature sensing interferometer is used to obtain the measured reflection spectrum. The reflection spectrum of the reference interferometer obtained using the F-P interference principle is superimposed during data processing to achieve the Vernier effect. In the range between 30 ℃ and 55 ℃, the temperature sensitivity of 5. 0380 nm/℃ was achieved. Controllable temperature sensitivity can be achieved by changing the cavity length of the reference interferometer. Besides, the dip point of the Vernier envelope for measurement can be placed at any desired wavelength by changing the initial phase of the reference interferometer’s incident light. A sensing interferometer with cavity length of 118. 60 μm and a reference interferometer with cavity length of 96. 60 μm were designed and prepared to conduct a temperature sensitization experiment based on the parallel Vernier effect. The measurement sensitivity of 2. 7984 nm/℃ was obtained, which is consistent with the temperature sensitivity achieved by superimposing the F-P reflection spectrum with the same cavity length. The relative error is only 0. 57%. Thus, the proposed method is feasible and effective. Besides, it solves the problem that the reference interferometer is vulnerable to the external environment.