表面缺陷的偏振散射表征方法及区分原理

Polarization Scattering Characterization and Discrimination Principle of Surface Defects

为了区分微米量级表面上方颗粒物灰尘与表面下方气泡粒子这两种表面缺陷,根据菲涅耳透射定律以及Mie散射理论,结合穆勒矩阵建立了两种表面缺陷的偏振透射模型,在此基础上通过仿真分析,得到元件折射率、缺陷种类、缺陷尺寸、入射波长、入射角度对两种表面缺陷粒子的偏振透射特性的影响。最终通过实验验证证明了模型具有较高的准确性,具备实际的仿真模拟分析和工程应用价值。

In order to distinguish the two kinds of surface defects,particulate dust above the surface and bubble particles below the surface,we establish two polarization transmission models of surface defects according to the Fresnel transmission law and Mie scattering theory,combined with the Mueller matrix.Through simulation analysis,the influence of component refractive index,defect type,defect size,incident wavelength,and incident angle on the polarization transmission characteristics of the two surface defect particles is obtained.Finally,the experimental verification proves that the model has high accuracy and is important both in theoretical research and engineering.