摘要
Strontium titanate films with high a-axis-orientation [a(100) =94.1%] were deposited on (111) Pt/Ti/SiO_(2)/Si substrates by the metal organic deposition process.X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature.It is found that the dielectric properties are improved by a higher annealing temperature,while the leakage currents are also enhanced,and the possible causes of temperature dependence are discussed.
作者
WANG Xiao-Fei
HU Qiu-Bo
LI Li-Ben
CHEN Qing-Dong
WANG Hui-Xian
王晓飞;胡秋波;李立本;陈庆东;王会娴(School of Physics and Engineering,Henan University of Science and Technology,Luoyang 471003;Department of Mathematics and Science,Luoyang Institute of Science and Technology,Luoyang 471023;Luoyang Key Laboratory of Photonic and Electronic Materials,Luoyang 471003)
基金
Supported by the National Natural Science Foundation of China under Grant No 50972056.
