摘要
Strontium titanate films with high a-axis-orientation [a(100) =94.1%] were deposited on (111) Pt/Ti/SiO_(2)/Si substrates by the metal organic deposition process.X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature.It is found that the dielectric properties are improved by a higher annealing temperature,while the leakage currents are also enhanced,and the possible causes of temperature dependence are discussed.
作者
王晓飞
胡秋波
李立本
陈庆东
王会娴
WANG Xiao-Fei;HU Qiu-Bo;LI Li-Ben;CHEN Qing-Dong;WANG Hui-Xian(School of Physics and Engineering,Henan University of Science and Technology,Luoyang 471003;Department of Mathematics and Science,Luoyang Institute of Science and Technology,Luoyang 471023;Luoyang Key Laboratory of Photonic and Electronic Materials,Luoyang 471003)
基金
Supported by the National Natural Science Foundation of China under Grant No 50972056.
