摘要
The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption.The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example.We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation,which depends on the bond configurations formed by the adsorbed atoms and substrate atoms.This study is helpful for optimal design of microcantilever-based sensors for various applications.
作者
ZHANG Ji-Qiao
FENG Xi-Qiao
HUANG Gan-Yun
YU Shou-Wen
张吉桥;冯西桥;黄干云;余寿文(Faculty of Civil and Transportation Engineering,Guangdong University of Technology,Guangzhou 510006;AML,Department of Engineering Mechanics,Tsinghua University,Beijing 100084;Department of Mechanics,School of Mechanical Engineering,Tianjin University,Tianjin 300072)
基金
Supported by the National Natural Science Foundation of China under Grant Nos 11102043,10732050 and 11072170
the National Basic Research Program of China under Grant No 2010CB631005
the Doctorial Start-up Fund of Guangdong University of Technology under Grant No 083065.
