摘要
Roughened surfaces of light-emitting diodes(LEDs)provide substantial improvement in light extraction efficiency.By preparing the self-assemble nanoporous Ni template through rapid annealing of a thin Ni film,followed by a low damage dry etching process,a p-side-up LED with a roughened surface has been fabricated.Compared to a conventional LED with plane surface,the light output of LEDs with nanoporous p-GaN surface increases up to 71%and 36%at applied currents of 1 mA and 20 mA,respectively.Meanwhile,the electrical characteristics are not degraded obviously after surface roughening.
基金
Supported by the National Basic Research Program of China(2011CB301900)
the National Natural Science Foundation of China(61176063,60990311,60820106003,60906025,60936004)
The Nature Science Foundation of Jiangsu Province(BK2008019,BK2010385,BK2009255,BK2010178)
the Research Funds from NJU-Yangzhou Institute of Optoelectronics.
