Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes

We achieve enhanced actuation of the 2^(nd)-order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration.A torque about the static point of the 2^(nd) eigenmode is generated in this configuration and therefore enables effective actuation of the 2^(nd)-order resonance.It is further confirmed that the torque has the effect of suppressing the 1^(st)-order resonance.As a result,the frequency response curve of the microcantilever beam can be modulated.Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.