摘要
We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography.The patterns were fabricated by laser writing and wet-etching.The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405nm and 0.90,respectively.The wet-etching was carried out in a 17wt% ammonium sulfide solution.Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer.The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.
作者
李豪
王睿
耿永友
吴谊群
魏劲松
LI Hao;WANG Rui;GENG Yong-You;WU Yi-Qun;WEI Jing-Song(Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800;Key Lab of Functional Inorganic Material Chemistry(Ministry of Education),Heilongjiang University,Harbin 150080)
基金
Supported by the National Natural Science Foundation of China under Grant Nos 61137002 and 61178059.