Si_(1-x)Ge_(x)/Si Single-Mode Rib Waveguides with 0.5 dB/cm by Molecular Beam Epitaxy

Si_(1-x)Ge_(x)/Si single-mode rib waveguides with 0.5dB/cm losses have been fabricated,in which the SiGe layers are grown by molecular beam epitaxy.The single-mode waveguide dimensions determined experimentally are consistent with the single-mode theory of SiGe waveguides.