摘要
A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method.Over 78.5%coupling efficiency(>-1.05 dB)with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know.This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
作者
张灿
孙晶华
肖希
孙伟民
张晓峻
储涛
余金中
俞育德
ZHANG Can;SUN Jing-Hua;XIAO Xi;SUN Wei-Min;ZHANG Xiao-Jun;CHU Tao;YU Jin-Zhong;YU Yu-De(College of Science,Harbin Engineering University,Harbin 150001;State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083)