摘要
Diamond films(DF)have been deposited on AlN ceramic substrates by hot filament chemical vapour deposition method.The diamond nucleation on AlN ceramics has been investigated.A nucleation density more than 10^(8) cm^(-2) was obtained on this kind of insulating polycrystalline substrate under common deposition conditions.The thermal conductance of the DF/AlN compound materials has been studied by photothermal deflection technique.The thermal diffusivity of the DF/AlN is higher than that of the AlN ceramics,and will increase as the diamond films grow thicker.
基金
Supported by the National Advanced Material Committee of China。
