Silicon-on-Insulator 2×2 Symmetric Optical Switch Based on Total Internal Reflection

Based on the large cross-section single-mode rib waveguide condition,the total internal reflection and the free-carrier plasma dispersion effect,a silicon-on-insulator(SOI)2×2 symmetric optical waveguide switch with a transverse injection structure has been proposed and fabricated,in which the SOI technique utilizes silicon and silicon dioxide thermal bonding and back-polishing.The device performance is measured at the wavelength of 1.3μm.It shows that the crosstalk and insertion loss are less than -18.1 and 4.8 dB,respectively,at an injection current of 60mA,and response time is 110 ns.