摘要
A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa_(2)Cu_(3)O_(7-δ)film growth.This method makes use of the temperature difference between the heater and the substrate.By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured,it is possible to monitor the film thickness and the film surface temperature during deposition.Experimental results show that this is a simple and practicable method.
基金
Supported by the National Centre for Research and Development on Superconductor of China.
