Unit-Cell by Unit-Cell Epitaxial Growth of SrTiO_(3) and BaTiO_(3) Thin Films by Laser Molecular Beam Epitaxy

Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO_(3) and heteroepitaxial BaTiO_(3) films were fabricated on SrTiO_(3)(100)substrates by laser molecular beam epitaxy.The fine streak patterns and more than 1000 cycles undamping intensity oscillation were obtained by in situ reflection high-energy electron diffraction with precisely controlled intermittence between each unit-cell layer.The surface morphology of the films was examined by atomic force microscopy.The root-mean-square surface roughness of the films is about 0.1 nm.