摘要
Hydrogen is produced by direct dissociation of water vapor,i.e.,splitting water molecules by the electrons in water plasma at low pressure(<10–50 Torr)using microwave plasma discharge.This condition generates a high electron temperature,which facilitates the direct dissociation of water molecules.A microwave plasma source is developed,utilizing the magnetron of a microwave oven and a TE10 rectangular waveguide.The quantity of the generated hydrogen is measured using a residual gas analyzer.The electron density and temperature are measured by a Langmuir probe,and the neutral temperature is calculated from the OH line intensity.