摘要
Semi-polar ZnO (1011) epitaxial films are demonstrated using a methanol oxidant by metalorganic chemical vapor deposition on Si (111) substrates at 500℃.X-ray (O) scanning indicates that there are six kinds of in-plane domain growths,with the ZnO [1012] parallel to the Si (11(2)〉 direction families.The crystallographic orientation of ZnO is supposed to be caused by surface passivation.The methanol,as a polar molecule,may be adsorbed on the Si (111) surface to form a passivation layer,which inhibits the (0001) ZnO plane deposition on the substrate surface,and as a result the ZnO (1011) plane becomes preferred.The optical properties,examined by a roomtemperature photoluminescence spectrum,exhibit a strong near-band-edge emission peak at 379nm,indicating that the (1011) ZnO film has good crystal quality.These results are significant for research into and for the applications of semi-polar ZnO films.
基金
Supported by the National Science Foundation of China under Grant Nos 61006004,60976008 and 10979507
the National Basic Research Program of China under Grant No A000091109-05
the National High-Technology R&D Program of China under Grant No 2011AA03A101.
