摘要
为了解决MEMS微镜扫描角度较小的缺点,设计了一种MEMS微镜与无刷电机同步扫描系统。该系统由STM32微控制器、DDS驱动电路、相位检测电路组成。通过设计光栅码盘实现对无刷电机速度的测量,由PID算法控制电机转速使电机反馈信号与MEMS微镜反馈信号频率相同,并检测两路反馈信号的相位差,调节DDS驱动信号的相位实现相位同步。实验表明,系统工作稳定,相位误差不超过1.5%。
In order to solve the shortcoming of narrow scanning angle of micro-electro-mechanical system(MEMS)micromirror,a synchronous scanning system of MEMS micromirror and brushless motor was designed.The system consists of STM32 microcontroller,direct digital synthesis(DDS)drive circuit,and phase detection circuit.The speed measurement of the brushless motor is realized by designing the grating code disc.The proportion integration differentiation(PID)algorithm controls the motor speed so that the motor feedback signal and the MEMS micromirror feedback signal have the same frequency and the phase difference of the two feedback signals can be detected.Adjust the phase of DDS drive signal to achieve phase synchronization.Experiments show that the system works stably and the phase error does not exceed 1.5%.
作者
周珏
吴东岷
Zhou Jue;Wu Dongmin(School of Microelectronics,University of Science and Technology of China,Hefei 230026,China;Suzhou Institue of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215000,China)
出处
《电子技术应用》
2021年第7期92-96,共5页
Application of Electronic Technique
基金
国家重点研发计划(2018YFB130550)。
