摘要
The TiN coating changed from columnar structure to compact texture after N^(+)and C^(+)implantation.X-ray analysis showed that combining with N atoms,Ti and Ti_(2)N would be transformed into TiN Phases during N implantation.The ternary solid solution mixtures TiCN have been formed,while Ti,Ti_(2)N would be transformed into TiC and TiCN phases combining with C atoms after C implantation.The hardness of the TiN coating increased by 2.3-2.4 times after N^(+)or C^(+)implantation.The wear resistance of implanted TiN coatings is 2-3 times higher than that of unimplanted TiN coatings.When the drills were treated with the method,their lifetime would increase by 7 times comparing with unimplanted ones.As an attractive procedure,the ion implantation of the TiN coatings would find new applications in many fields.
作者
张通和
吴瑜光
赵志勇
邓志威
ZHANG Tong-he;WU Yu-guang;ZHAO Zhi-yong;DENG Zhi-wei(Institute of Low Energy Nuclear Physics,Radiation Beam and Materials Engineering Open Laboratory of Department of Education of China,Beijing Radiation Center,Beijing Normal University,Beijing 100875)
基金
Supported by the 863 High Technology Program of China(863-715-023-02-01)
the National Natural Science Foundation of China under Grant No.59671051.