Modification of TiN Coatings by N^(+) and C^(+) Implantation with High Ion Flux

The TiN coating changed from columnar structure to compact texture after N^(+)and C^(+)implantation.X-ray analysis showed that combining with N atoms,Ti and Ti_(2)N would be transformed into TiN Phases during N implantation.The ternary solid solution mixtures TiCN have been formed,while Ti,Ti_(2)N would be transformed into TiC and TiCN phases combining with C atoms after C implantation.The hardness of the TiN coating increased by 2.3-2.4 times after N^(+)or C^(+)implantation.The wear resistance of implanted TiN coatings is 2-3 times higher than that of unimplanted TiN coatings.When the drills were treated with the method,their lifetime would increase by 7 times comparing with unimplanted ones.As an attractive procedure,the ion implantation of the TiN coatings would find new applications in many fields.