摘要
Elastic recoil detection analysis technique with△E-E particle identification and Q3D momentum analysis has been developed to determine high resolution depth profiles in thin foils and multilayer systems.A depth resolution of 1.2nm was achieved at the surface of the samples using a high quality 100 MeV^(127)I beam.The method was applied to depth profile analysis of C/LiF multilayers,superconductor and GaN foil samples.
作者
路秀琴
符长波
梁刚
郭继宇
赵葵
李淑媛
刘建成
姜华
杨丙凡
LU Xiu-qin;FU Chang-bo;LIANG Gang;GUO Ji-yu;ZHAO Kui;LI Shu-yuan;LIU Jian-cheng;JIANG Hua;YANG Bing-fan(Department of Nuclear Physics,China Institute of Atomic Energy,Beijing 102413)
基金
Supported by the National Natural Science Foundation of China under Grant NO.19775067
the Nuclear Industry Science Foundation of China undet Grant No.H7196A0113.
