摘要
In this work,it is found that the compressive stress on the surface of cubic-BN(c-BN)film is all smaller than that inside c-BN film and after a longer period,the depositing matter mainly is of hexagonal-BN phase rather than c-BN phase,those just are the reason why a pure thicker c-BN film cannot,as yet,be obtained.Up to now the lowest IR peak position of 1004.7cm-1 detected from a broken and part delaminated c-BN film may be one close to the stressless c-BN.
基金
Supported by the National Natural Science Foundation of China under Grant No.19774025
Jilin Province Science and Technology Foundation.
