Electron Field Emission from Nitrogen Ion Implantat ion Diamond-Like Carbon Film

The electron field emission from both diamond-like carbon(DLC)and nitrogen doped diamond-like carbon films by ion implantation was studied.The DLC films were deposited on a molybdenum layer coated on ceramic by using pulsed laser deposition.The field emission measurements show that the incorporation of nitrogen in DLC films can increase current density and lower the turn-on field from 9 to 4 V/μm,which indicate that the nitrogen doped DLC films have a potential application as field emission materials for flat panel displays.