摘要
The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model.The model consists of equations of particle continuity,Poisson's equation,and the electron energy equation.The effect of the concentrations of O_(2) in N_(2) on the discharge characteristics is analyzed.The results show that when the concentration of O_(2) in N_(2) is less than 12%,as the amount of O_(2) grows,the electron density and the N4+ion density decrease;the main negative particles are electrons.When the concentration of O_(2) in N_(2) is greater than 12%,the electron density and the N_(4)^(+) ion density increase with the increasing admixture of oxygen;the main negative particle is the O^(-) ion.Moreover,the O^(-) ion density,the O_(2)^(+) ion density,the electron temperature and the mixture gases electronegativity increase with growth of O_(2) in the range from 4%to 20%and with density of O_(2) in N_(2).
作者
WANG Yi-Nan
LIU Yue
LIN Guo-Qiang
王一男;刘悦;林国强(Key Laboratory of Materials Modification by Laser,Electron,and Ion Beams(Ministry of Education),School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024)
基金
Supported by the National Natural Science Foundation of China under Grant Nos 11075030,11105065,11275041
the National Basic Research Program of China under Grant Nos 2008CB717801,2008CB787103,2009GB105004,2010GB106002
the Fundamental Research Funds for the Central Universities of China under Grant Nos DUT12ZD(G)01,DUT12ZD201.
