蔡司场发射扫描电镜Sigma 500真空系统故障与排除

Vacuum system faults and troubleshooting of ZEISS field emission scanning electron microscope Sigma 500

场发射扫描电镜是科研工作中不可或缺的重要工具之一,管理者要及时排查、解除故障,以缩短维修周期、节约维修经费,保障仪器高效有序运行。本文对蔡司Sigma 500真空系统在使用过程中发生的故障进行了分析排查并对解决方法进行了归纳总结,给同款仪器用户以借鉴。

Field emission scanning electron microscopy is one of the indispensable tools in scientific research.Managers should investigate and resolve faults in time to shorten the maintenance period,save maintenance costs and keep the operation of the instrument efficiently.This paper analyzes and troubleshoots the faults that occur in the use of the Zeiss Sigma 500 vacuum system.By summarizing the solutions to the faults,to provide some reference value to the peers.