摘要
综述了采用溶胶-凝胶法制备AZO薄膜的进展,阐述了影响AZO薄膜光电特性的主要工艺参数,分析了陈化时间、热处理工艺、铝掺杂量、催化剂种类及薄膜厚度因素等对AZO薄膜结构、光电性能的影响,指出了溶胶-凝胶法制备AZO薄膜的优势与不足,展望了未来的研究方向。
The research progress of sol-gel technology used to prepare AZO film are reviewed.The influence of sol-gel parameters such as aging time,heating processing,quantity of dopant aluminum,kinds of activator and thickness of film on the structure and optical electrical properties of AZO film are discussed and summarized.The advantage and insufficiency of sol-gel technology were pointed out and research direction of future were proposed.
作者
纪建超
颜悦
哈恩华
JI Jian-chao;YAN Yue;HA En-hua(Beijing Institute of Aeronautical Materials,Beijing 100095,China)
出处
《真空》
CAS
2021年第4期30-35,共6页
Vacuum
基金
国家自然科学基金资助项目(57802297)。
关键词
AZO薄膜
溶胶-凝胶
光电特性
AZO film
sol-gel
optical and electrical performance
