剪切型压电变压器振动基元尺寸参数对振动模态影响的研究

Study on the Influence of the Size Parameters of the Vibration Element of the Shear Piezoelectric Transformer on the Vibration Mode

压电变压器在集成电路中有广泛的使用需求,剪切型压电变压器利用压电材料剪切振动模态优异的压电和机电耦合性能,有着极大的研究价值和发展前景。文章利用有限元方法,仿真分析了剪切型压电变压器振动基元尺寸参数变化对剪切振动模态的影响。为验证有限元仿真计算结果,文章通过激光多普勒振动测量仪测量压电变压器3个振动基元的振动情况,并且通过实验测试了压电变压器的性能指标,其中输入端尺寸为10 mm,输出端尺寸为20 mm的变压器综合性能最佳。当输出端负载为5.1 kΩ时,变压器的变压比为6,效率为91%;当负载为200 kΩ时,变压比增大到34.1,效率为13.04%。

The piezoelectric transformer has a wide range of needs in an integrated circuit,shear piezoelectric transformer utilizing a piezoelectric material having excellent piezoelectric shear vibration mode electromechanical coupling and performance,and has great prospects for development research value.In the paper,the finite element method is used to simulate and analyze the influence of the change of the vibration element size parameters of the shear piezoelectric transformer on the shear vibration mode.To verify the results of the finite element simulation,herein three vibration measuring vibration piezoelectric transformer element group by a laser doppler vibration gauge.Finally,the performance indicators of the piezoelectric transformer are tested through experiments.The transformer with the input end size of 10 mm and the output end size of 20 mm has the best overall performance.When the output load is 5.1 kΩ,the transformation ratio of the transformer is 6,and the efficiency is 91%;when the load is 200 kΩ,the transformation ratio is increased to 34.1,and the efficiency is 13.04%.