一款像素级开关电容阵列波形采样芯片

A Waveform Sampling Chip with Pixel-Level Switched Capacitor Array

设计了一款基于GSMC 130 nm CMOS工艺的像素级开关电容阵列(SCA)波形采样芯片。该芯片由32×32像素阵列和读写控制电路组成,每个像素集成了裸露的顶层金属、pn结和32×32 SCA,裸露的顶层金属和pn结作为电荷收集电极,SCA用于存储波形信号,每个像素尺寸约为150μm×156μm。测试结果表明:拟合的直流传输函数与理论分析相符,该波形采样芯片的输入满量程约为1 V,单次成像模式下帧率可达10 MHz,直流噪声等效噪声电荷电子个数约为24 890,对正弦波信号采样后能够比较好地还原出原始信号波形。

A pixel-level switched capacitor array(SCA) waveform sampling chip based on GSMC 130 nm CMOS process was designed.The chip consisted of a 32×32 pixel array and a read-write control circuit.Each pixel was integrated with a bare topmetal, a pn junction and a 32×32 SCA.The bare topmetal and pn junction were used as charge collecting electrodes, and the SCA was used to store waveform signals.The size of each pixel is about 150 μm×156 μm.The test results show that the fitted DC transfer function agrees with the theoretical analysis.The input full scale of the waveform sampling chip is about 1 V,the frame rate is up to 10 MHz in single shot imaging mode, and the DC noise equivalent noise charge is about 24 890 electrons.The original signal waveform can be recovered well after sampling the sine wave signal.