摘要
为了提高短法珀腔干涉式微压传感器峰值解调法的精度,本文研究了基于法珀干涉的石墨烯光纤微压传感器的解调方法。利用FDTD Solutions光学仿真软件仿真模拟传感器的反射光谱,搭建了传感器测试系统。采用Savitzky-Golay卷积平滑滤波和洛伦兹局部拟合相结合的峰值解调法,并利用多峰解调法解调出腔长,分析压力和腔长的关系。实验结果表明:采用Savitzky-Golay卷积平滑滤波明显滤除噪声信号,洛伦兹拟合寻找波谷的精度优于高斯拟合寻找波谷的精度,在0~0.1 MPa范围,传感器灵敏度为73.766 nm/kPa。
In order to improve the accuracy of the peak demodulation method of the short Fabry-Perot cavity interferometric micro-pressure sensor, the demodulation method of graphene optical fiber micro-pressure sensor based on Fabry-Perot interference is described. The FDTD Solutions optical simulation software is used to simulate the reflection spectrum of the sensor, and the test system is built. The peak demodulation method combining Savitzky-Golay convolution smoothing filter and Lorentz local fitting is used. The cavity length is demodulated by the multi-peak demodulation method, and the relationship between pressure and cavity length is analyzed. The experimental results show that the Savitzky-Golay convolution method can be significantly used to filter out the noise signal. The accuracy of Lorentz fitting to find the trough is better than that of Gaussian fitting. In the range of 0~0.1 MPa, the sensor sensitivity is 73.766 nm/kPa.
作者
张鹏
葛益娴
顾钦顺
沈令闻
ZHANG Peng;GE Yixian;GU Qinshun;SHEN Lingwen(School of Electronic and Information Engineering,Nanjing University of Information Science and Technology,Nanjing 210044,China;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology,Nanjing University of Information Science and Technology,Nanjing 210044,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2021年第5期609-614,共6页
Chinese Journal of Sensors and Actuators
基金
江苏高校优势学科Ⅱ期建设工程项目(“信息与通信工程”优势学科)。
