双层微梁结构谐振器中波动温度场的研究

An analytical Model of the Fluctuation Temperature in Bilayered Beam Resonators

针对两端固定双层微梁结构谐振器,利用格林函数,求解了一维热传导时梁中的波动温度场分布函数。通过解析模型计算结果与有限元数值模型计算结果的比较,验证了所得解析模型的有效性,并讨论两种模型的优缺点。研究结果表明:波动温度的幅值仅为平衡温度的0.06%左右,由于波动温度场产生的热应变也非常小;激振频率对波动温度场的影响非常大;微梁的总长度与材料比对温度场也有影响。

In this paper, an analytical model of the fluctuation temperature in bilayered fixed-fixed microbeam with one-dimension heat conduction has been developed utilizing the Green’s Function. In order to validate the present analytical model, the results of the numerical model(finite element method, FEM)have been given to compare with those of the analytical model. They are agreed well with each other. The advantage and disadvantage of two models were discussed. The results show that the fluctuation temperature is about 0.06% of the reference temperature. The thermal strain due to the fluctuation temperature is neglectable small. The excitation frequency has significant effect on the fluctuation temperature. The length of the bilayered beam and the volume fraction of the material also have effect on the fluctuation temperature.