晶圆片盒传输机械手设计与运动仿真

Design and Motion Simulation of Wafer Cassette Transport Manipulator

为满足立式扩散炉设备中晶圆片盒传输效率及定位精度高的要求,设计了一种五自由度混合型机械手,主体结构由Y、Z轴方向模组及SCARA机械手组成。利用改进型D-H法建立各连杆间的运动学模型,并进行运动学正逆求解;针对无穷逆解的问题,通过构造目标优化函数结合粒子群优化(PSO)算法进行求解。最终基于MATLAB完成仿真分析,结果表明所建立的运动学方程正确,机械手的工作空间满足使用要求,所得最优逆解可使机械手末端达到设定的定位精度。

In order to meet the high requirements of wafer cassette transmission efficiency and positioning accuracy in the vertical diffusion furnace equipment,a five-degree-of-freedom hybrid manipulator was designed.The main structure is composed of Y,Z-axis direction modules and SCARA manipulators.The improved D-H method is used to establish the kinematics model between the connecting rods,and the kinematics forward and inverse are solved;for the infinite inverse solution,the problem is solved by constructing the objective optimization function combined with the particle swarm optimization(PSO)algorithm.Finally,the simulation analysis is completed based on MATLAB.The results show that the established kinematic equation is correct,the working space of the manipulator meets the requirements of use,and the optimal inverse solution obtained can make the end of the manipulator reach the set positioning accuracy.