基于STM32的卷对卷空间隔离原子层沉积设备张力控制系统设计

Design of Tension Control System for Roll-to-roll Spatial Atomic Layer Deposition Equipment Based on STM32

为了改善卷对卷空间隔离原子层沉积设备由于柔性运输基板张力控制引起的薄膜产品质量降低的问题,设计了一种基于STM32的闭环张力自动控制系统以实现张力的精确控制。该系统通过张力传感器对张力进行实时检测,结合PID控制算法通过电气比例阀对气缸出力进行控制,从而实现对张力的闭环控制。将该系统应用在卷对卷空间隔离原子层沉积设备上并进行测试,结果表明:该张力控制系统具有良好的稳定性与可靠性,在设备静止工况下张力的稳态误差最低能达到5%以内,运动工况下的张力波动率最低能达到15%以内。并且在较好的张力控制下,薄膜的制造重复性与产品质量均得到显著改善。

In order to solve the problem of film quality degradation caused by the tension control of flexible transport substrate in the roll-to-roll spatial atomic layer deposition equipment,an automatic closed-loop tension control system based on STM32 was designed to realize accurate tension control.The tension of the system was detected in real time by the tension sensor,and the output of the cylinder was controlled by the electric proportional valve in combination with the PID control algorithm,so as to realize the closed-loop control of the tension.The system was applied to the roll-to-roll spatial atomic layer deposition equipment and tested.The results show that the tension control system has good stability and reliability,the steady-state error of the tension reach the minimum of less than 5%under the static condition,and the fluctuation rate can reach the minimum of less than 15%under the moving condition.The repeatability and product quality of the film are improved significantly with better control.