类金刚石薄膜应用与制备技术发展现状

Development of Diamond-like Film Application and Preparation Technology

为充分发挥类金刚石薄膜的优良特性,促进其广泛应用,分析了DLC碳膜结构特点、优良性质及应用现状,综述了类金刚石薄膜的几种常见制备方法:等离子增强化学气相沉积法(PECVD)、脉冲激光沉积法(PLD)、磁过滤阴极真空电弧法(FCVA)、磁控溅射法(MS)。分析了常用元素的掺杂改性手段,比较了不同制备方法的优缺点,总结了不同制备方法技术成熟度,展望了DLC碳膜未来应用前景和发展方向。

In order to fully play the fine characteristics of diamond-like film,and promote its wide application,we analyze the characteristics,fine characteristics and application situation of DLC carbon film,and summarize several common preparation methods of diamond-like films,such as PECVD,PLD,FCVA and MS.Then we analyze doping vario-property of common elements,compare the advantages and disadvantages of different preparation methods,summarize the technological maturity of different preparation methods,and prospect the future application prospect and development direction of DLC carbon film.